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MEMSnet Home: MEMS-Talk: Regarding Deposition of Piezoelectric materials
Regarding Deposition of Piezoelectric materials
1998-12-05
Jayant Neogi
Regarding Deposition of Piezoelectric materials
Jayant Neogi
1998-12-05
Hi:

I would really appreciate it if someone can please comment on the following
issues:

1. Relevant literature related to Piezoelectric material deposition
(specially ZnO and PZT) on Silicon or metals.
2. Do you know someone vendor/researcher who can do custom Piezoelectric
deposition work.
3. Can someone comment on voltage response of ZnO and PZT materials as a
function of film thickness/volume.
4. Can FIB GIS system be modified to deposit ZnO?

Thank you in advance and am looking forward to your response.
Regards
Jayant Neogi
**********************************************************
Jayant Neogi
Director: Research and Development
NORSAM Technologies
Ph#  (503) 640-0586
Fax# (503) 640-8117
************************************************************


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