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MEMSnet Home: MEMS-Talk: SU-8 residues on photomask
SU-8 residues on photomask
2011-04-21
Shane GUO
2011-04-21
Michael Riss
2011-04-22
첸로
2011-05-19
Shane GUO
SU-8 residues on photomask
첸로
2011-04-22
Hi,

In my opinion, the su-8 does not evaporate well. You can have a tweezer to check
prior to UV expose.

I always do that and it will help.
Regards


At 2011-04-22 04:38:22,"Michael Riss"  wrote:

>Hi,
>
>my experience with Polystyrene is that it starts to get soft at
>~60-70 °C. So I would double-check that the type of Polystyrene you
>use can stand the soft-baking/cross-linking temperature
>(typically 95 °C) without melting and mixing with the SU-8 and
>SU-8 solvent on top.
>
>Regards,
>Michi
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