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MEMSnet Home: MEMS-Talk: SU-8 help
SU-8 help
1999-05-24
Kristopher L Kriechbaum
SU-8 help
Kristopher L Kriechbaum
1999-05-24
Hi everyone,

I am using SU-8 to fabricate microparts.  I have checked the web pages
and read some papers, but I am still having difficulty.  My main problem
is obtaining the correct thickness (about 150 microns).  Another problem
is with my exposure.  I can't seem to find the right dose.  Any help
would be greatly appreciated.

Thanks in advance,

Kristo Kriechbaum
Carnegie Mellon University


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