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MEMSnet Home: MEMS-Talk: Photoresist adherence to hydrophobic substrates
Photoresist adherence to hydrophobic substrates
1999-05-25
Marc A. Unger
Photoresist adherence to hydrophobic substrates
Marc A. Unger
1999-05-25
Hi all -

I'm trying to get photoresist (currently Shipley 5740, but any AZ type resist
would also be fine) to stick to a hydrophobic polymer (silicone).
Has anyone succeeded in doing this already?  Anyone have any suggestions of
what might be good to try?

Thanks in advance,

Marc Unger
ungerm@cco.caltech.edu
Applied Physics
Caltech


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