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MEMSnet Home: MEMS-Talk: ahdesion layer for gold
ahdesion layer for gold
1999-05-26
Marc Llaguno
ahdesion layer for gold
Marc Llaguno
1999-05-26
I'm having problems with etching a 10 nm Cr adhesion layer under 200
nm of gold. we always seem to get several microns of undercut. Is this
because of the gold thickness? Could there be adhesion problems between
gold and chrome for this thickness?
any suggestions/comments will be appreciated.

Marc Llaguno
University of Pennsylvania


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