Contact-free cleaning of limestone on FS/Ta2O5 substrates
Roger Shile
2011-06-14
My experience with extremely hard well water is vinegar to remove
residue from coffee maker and cooking utensils, muriatic acid to clean
toilet bowels ...
Roger Shile
-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of
Ruiz, Marcos Daniel (SENCOE)
Sent: Monday, June 13, 2011 10:13 AM
To: General MEMS discussion; [email protected]
Subject: [mems-talk] Contact-free cleaning of limestone on
FS/Ta2O5substrates
Unfortunately, dried liquid residue (water spots) is notoriously
difficult to remove. I would recommend Summa Clean (basically a soapy
mixture) and agitation in a megasonic or ultrasonic tank - as aggressive
as your samples can handle.
Dan Ruiz