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MEMSnet Home: MEMS-Talk: make the su-8 surface flat
make the su-8 surface flat
2011-06-10
첸로
2011-06-10
Khaled Mohamed Ramadan
2011-06-10
Xiaohui Lin
2011-06-10
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2011-06-10
Eric Johnston
2011-06-11
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2011-06-11
dai truong
2011-06-12
gau s
2011-06-13
Shane GUO
2011-06-14
Khaled Mohamed Ramadan
2011-06-14
Shane GUO
2011-06-15
Gareth Jenkins
2011-06-15
Shane GUO
2011-06-16
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2011-07-06
Le Hong Hanh
2011-07-12
Shane GUO
2011-07-16
Bill Moffat
make the su-8 surface flat
Shane GUO
2011-06-15
Hi Gareth,

It could be. I cleaned my silicon wafer using acetone, IPA and DI water. Then it
is blown dry by N2 and baked for a while.

Thanks
reply
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