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MEMSnet Home: MEMS-Talk: Quartz wafer dicing
Quartz wafer dicing
2011-07-21
Thomas Reddy
2011-07-21
Shay
2011-07-21
Khawar Abbas
Quartz wafer dicing
Thomas Reddy
2011-07-21
Hi everyone,

Does anyone know how I can dice my 4" quartz wafer to quarter pieces?
I should mention that I have a Cr-Au layers on my wafer and don't know that is
it possible to find any way for protecting them? Does fluid and soup of the
dicing saw damage my Cr-Au layers?

Regards,
Thomas
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