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MEMSnet Home: MEMS-Talk: Quartz wafer dicing
Quartz wafer dicing
2011-07-21
Thomas Reddy
2011-07-21
Shay
2011-07-21
Khawar Abbas
Quartz wafer dicing
Khawar Abbas
2011-07-21
Thomas,

My suggestion would be to spin some photoresist on your wafer before
dicing. Later all the debris from the dicing can be cleaned by simply
soaking in acetone and ultrasonic agitation. It will also prevent your
metal surface from scratching.


--
Khawar

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