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MEMSnet Home: MEMS-Talk: Negative resist foe lift-off and stable at 250C
Negative resist foe lift-off and stable at 250C
2011-08-07
Majid Beidaghi
2011-08-07
Mike Stan
2011-08-07
Bill Moffat
Negative resist foe lift-off and stable at 250C
Majid Beidaghi
2011-08-07
Hi All,

Could anybody please suggest a negative tone resist that is suitable for
lift-off and is stable up to 250 ° C. I want to achieve a thickness of at
least
10 micron.

Thanks

--
Majid Beidaghi
PhD Candidate
Department of Mechanical and Materials Engineering
Florida International University
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