Majid,

KMPR type resist might work well got your application.  It can coat up to 70um
in one coat.

Mike

----- Original Message -----
From: [email protected] 
To: [email protected] 
Sent: Sat Aug 06 19:53:55 2011
Subject: [mems-talk] Negative resist foe lift-off and stable at 250C

Hi All,

Could anybody please suggest a negative tone resist that is suitable for
lift-off and is stable up to 250 ° C. I want to achieve a thickness of at
least
10 micron.

Thanks

--
Majid Beidaghi
PhD Candidate
Department of Mechanical and Materials Engineering
Florida International University