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MEMSnet Home: MEMS-Talk: Negative resist foe lift-off and stable at 250C
Negative resist foe lift-off and stable at 250C
2011-08-07
Majid Beidaghi
2011-08-07
Mike Stan
2011-08-07
Bill Moffat
Negative resist foe lift-off and stable at 250C
Bill Moffat
2011-08-07
Majid,
          Lets discuss this it may be possible.  It will need experiments.
Silylation can make positive resist stable up to 300 degrees C and image
reversal will give perfect lift off profiles to positive resist.  I do not know
of a negative resist that offers any hope.  Bill Moffat 925 373 8353.

________________________________________
From: [email protected] [mems-talk-
[email protected]] on behalf of Majid Beidaghi
[[email protected]]
Sent: Saturday, August 06, 2011 4:53 PM
To: [email protected]
Subject: [mems-talk] Negative resist foe lift-off and stable at 250C

Hi All,

Could anybody please suggest a negative tone resist that is suitable for
lift-off and is stable up to 250 ° C. I want to achieve a thickness of at
least
10 micron.

Thanks

--
Majid Beidaghi
PhD Candidate
Department of Mechanical and Materials Engineering
Florida International University
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