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MEMSnet Home: MEMS-Talk: Dry etch 50nm Au film, possible?
Dry etch 50nm Au film, possible?
2011-08-11
Xiaohui Lin
2011-08-11
Shay
2011-08-11
Xiaohui Lin
2011-08-11
Paul Werbaneth
2011-08-11
Roger Shile
2011-08-14
Shay
2011-08-11
Robert Ditizio
2011-08-11
Michael Martin
2011-08-14
Mehmet Yilmaz
Dry etch 50nm Au film, possible?
Xiaohui Lin
2011-08-11
Did you mean the recipe for silicon dioxide etch will work for Au etch?

On Thu, Aug 11, 2011 at 1:16 AM, Shay  wrote:

> OXIDE rie will do it
>
> Shay
reply
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