Try this paper for ideas:  http://www.csmantech.org/Digests/1999/PDF/12.pdf

Cheers,

Paul

On Thu, Aug 11, 2011 at 10:55 AM, Xiaohui Lin
wrote:

> Did you mean the recipe for silicon dioxide etch will work for Au etch?
>
> On Thu, Aug 11, 2011 at 1:16 AM, Shay  wrote:
>
> > OXIDE rie will do it
> >
> > Shay

*Paul F. Werbaneth*

Cell:        +1 (707) 338-2837
E-mail:     [email protected]
LinkedIn:  http://www.linkedin.com/in/paulwerbaneth