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News	MEMSnet Home: MEMS-Talk: Dry etch 50nm Au film, possible? Dry etch 50nm Au film, possible? 2011-08-11 Xiaohui Lin 2011-08-11 Shay 2011-08-11 Xiaohui Lin 2011-08-11 Paul Werbaneth 2011-08-11 Roger Shile 2011-08-14 Shay 2011-08-11 Robert Ditizio 2011-08-11 Michael Martin 2011-08-14 Mehmet Yilmaz Dry etch 50nm Au film, possible? Roger Shile 2011-08-11 Please explain. Roger Shile -----Original Message----- OXIDE rie will do it Shay -----Original Message----- Hi all: Is it possible to use any dry etch receipt to etch Cr/Au film (50nm)? The mask of etching is Ni. reply
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