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MEMSnet Home: MEMS-Talk: Spinning SU 8 over AZ9260
Spinning SU 8 over AZ9260
2011-08-10
sumit kalsi
2011-08-10
Kevin Nichols
2011-08-11
Jerry Chen
2011-08-12
sumit kalsi
Spinning SU 8 over AZ9260
sumit kalsi
2011-08-12
no, i did not try the resist stripper, though i tried a water soluble
sacrificial layer but then the aqueous solution formed droplets on the surface
of glass rather than uniform layer!

 Kind Regards,

Sumit Kalsi



________________________________
From: Jerry Chen 
To: General MEMS discussion 
Sent: Thu, 11 August, 2011 9:56:31 AM
Subject: Re: [mems-talk] Spinning SU 8 over AZ9260

I also have the same problem, would like to use a sacrificial layer to
release the crosslinked SU8, AZ 40xt was used and not successful.

but did you try the AZ100 resist stripper?
reply
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