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MEMSnet Home: MEMS-Talk: Dry etch 50nm Au film, possible?
Dry etch 50nm Au film, possible?
2011-08-11
Xiaohui Lin
2011-08-11
Shay
2011-08-11
Xiaohui Lin
2011-08-11
Paul Werbaneth
2011-08-11
Roger Shile
2011-08-14
Shay
2011-08-11
Robert Ditizio
2011-08-11
Michael Martin
2011-08-14
Mehmet Yilmaz
Dry etch 50nm Au film, possible?
Shay
2011-08-14
Roger,

I can't explain but it just happens (I wish it didn't) I think it's somehow
very effective ion milling but it's way too fast to be it.

Shay

-----Original Message-----
From: mems-talk-bounces+shay=mizur.com@memsnet.org
[mailto:mems-talk-bounces+shay=mizur.com@memsnet.org] On Behalf Of Roger
Shile
Sent: Thursday, August 11, 2011 7:53 PM
To: General MEMS discussion
Subject: Re: [mems-talk] Dry etch 50nm Au film, possible?

Please explain.

Roger Shile
reply
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