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MEMSnet Home: MEMS-Talk: small batch wafer processing for wet chemistry
small batch wafer processing for wet chemistry
2011-09-01
Sarah McQuaide
2011-09-02
Kevin Nichols
2011-09-02
Jesse D Fowler
small batch wafer processing for wet chemistry
Sarah McQuaide
2011-09-01
Does anyone know of a manufacturer of small (5 or 10 slot) wafer cassettes
for wet chemical processing? I realize most tooling is built for industry
standard 25-wafer cassettes, but I am only inquiring about wet chemical
baths as processing in smaller containers with smaller cassettes would save
us a lot of dollars in chemicals.

Thanks in advance.
reply
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