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MEMSnet Home: MEMS-Talk: Chemically stable positive resist
Chemically stable positive resist
2011-09-20
sumit kalsi
2011-09-20
Michael Martin
Chemically stable positive resist
Michael Martin
2011-09-20
You might consider a photo-definable polyimide, e.g. HD8820 from HD Micro
systems.

-Michael

On Tue, Sep 20, 2011 at 12:00 PM, sumit kalsi wrote:

> Hi,
> I need to perform some experiments on positive resist which would involve
> buffer
> ph=7 and ethanol. Hence, I am looking for a positive resist which is
> chemically
> stable than AZ9260. Does anyone have experience with this?
>
>  Many thanks,
>
> Sumit
reply
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