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MEMSnet Home: MEMS-Talk: isotropic etch recipe for silicon dioxide without attacking
isotropic etch recipe for silicon dioxide without attacking
1999-06-03
Jer-Liang Yeh
isotropic etch recipe for silicon dioxide without attacking
Jer-Liang Yeh
1999-06-03
              aluminum

Hello Colleques,

        I am looking for an isotropic etch recipe (wet or dry) which
etches silicon dioxide but aluminum.  The purpose of this recipe is to see
the metal interconnection of any IC circuitry.  Thanks in advance!!

later,
Andrew


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