Dear All,

I am trying to use LOR 5A for release of SU 8 sheets. It worked fine with single
patterning of SU8. Recently I tried to use it for releasing SU 8 which is double
patterned, but it did not released SU 8. Could it be that because of two post
bakes that it is not releasing SU 8? I pattern SU 8 (around 50um) and then after
3-4 hours (because of overnight exposure with a laser), post bake it according
to specifications given by microchem. Then I expose it again and post bake
immediately. Develop it after atleast 4 hours. Has any one had any experience on
this? Any help is much appreciated.

Thanks a lot in advace!

Kind Regards,
Sumit