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MEMSnet Home: MEMS-Talk: LOR resist vs Omnicoat for SU 8 release
LOR resist vs Omnicoat for SU 8 release
2011-10-14
sumit kalsi
LOR resist vs Omnicoat for SU 8 release
sumit kalsi
2011-10-14
 Dear All,

Hope you all are doing great. I was wondering if any one of you has worked for
SU 8 release? I am currently using LOR 5A but then i have been told that LOR B
is better since its dissolution rate is high. Can somebody suggest, out of
omnicoat and LOR which is better for release of single SU 8 layer of thickness
50-100um (not multistructural layer, hence the released SU 8 will be a bit
brittle). Thanks a lot in advance. ANy comment is welcome even if it involved
the use of different release method!


Kind Regards,
Sumit
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