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MEMSnet Home: MEMS-Talk: Glass etching in BHF
Glass etching in BHF
1999-06-02
Yit-shun Leung Ki
Glass etching in BHF
Yit-shun Leung Ki
1999-06-02
Hi all,

We are seeking some information on wet etching of Pyrex and float glass.
Specifically, we are seeking a buffered solution and would like to know
what kind of HF concentrations can be obtained in such buffered
solutions and also what kind of buffers should be used. Any information
would be very helpful.

Thank you very much and best regards.

--
Yit-shun Leung Ki
For the microfluidics research group at the IMS
_______________________________________________________________
Institute of Microsystems (IMS)
Dept. of Microengineering,
Batîment BM,
Swiss Federal Inst. of Tech. (EPFL),    TEL: +41 21 693 7818
CH-1015 Lausanne                        FAX: +41 21 693 5950
Switzerland                             URL: dmtwww.epfl.ch/ims


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