Hi all,

Does anybody know a facility (preferable in Europe) for  Cr/Ir
evaporation on 6 inch wafers.
Thickness: 10 nm Cr / 15-200nm Ir.

Many thanks in advance.

Peter Kuijpers
Process Engineer
Philips Innovation Services
MiPlaza/TL group
High Tech Campus 04-p5.12
5656 AE Eindhoven
The Netherlands
Phone: +31 402743667
Mobile:+31 612507027, Mobex: +31 402798904
Email: [email protected]