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MEMSnet Home: MEMS-Talk: Reticle design software
Reticle design software
2011-11-21
Amos100
Reticle design software
Amos100
2011-11-21
Hello,

Is anyone familiar with a good photolihography reticle design software,
with capabilities of simulation?

Simulation should be in the areas of resistivity calculation of metal lines.

Any info would be helpful,

Thanks!
Amos
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