What are your feature sizes (beyond 100 micron depth)?

On Wed, Jan 4, 2012 at 7:50 AM, Ned Flanders  wrote:
> Thanks Bill,
>
> Thing is, I was really hoping I'd get a "no way" or "yay go for it"
> kind of answer, as the experiment would take half a day, which right
> now I don't have.
>
> Instead of chromium I could use tungsten, which also doesn't etch in
> the phosphoric acid, while aluminum won't etch in hot H2O2, as far as
> I know. Would that be a better electro-couple from the POW of
> undercut? For the record, I don't need to remove the inorganic mask
> after the last aluminum etch step.
>
>
> best
>
> m