MEMS-talk

News	MEMSnet Home: MEMS-Talk: Chromium as a mask for wet etching of aluminum Chromium as a mask for wet etching of aluminum 2012-01-03 Ned Flanders 2012-01-04 Bill Lytle 2012-01-04 Ned Flanders 2012-01-04 Kevin Nichols 2012-01-05 Ned Flanders 2012-01-04 Glenn Silveira 2012-01-05 Ned Flanders 2012-01-05 Bill Lytle Chromium as a mask for wet etching of aluminum Ned Flanders 2012-01-05 Hi, features are tens of um, up to 200 um for the largest covered features and 100 for the largest open areas. On 1/4/12, Kevin Nichols wrote: > What are your feature sizes (beyond 100 micron depth)? reply
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