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MEMSnet Home: MEMS-Talk: SU-8 2025 on AZ 4620 Sacrificial Layer
SU-8 2025 on AZ 4620 Sacrificial Layer
2012-01-04
Shiv GD
2012-01-04
Kevin Nichols
2012-01-06
Shiv GD
2012-01-07
Bill Lytle
2012-01-07
Felix Greiner
2012-01-08
Khaled Mohamed Ramadan
2012-01-10
Shiv GD
SU-8 2025 on AZ 4620 Sacrificial Layer
Shiv GD
2012-01-06
Thank you for your suggestion.

But, I actually want to use SU-8, and I can't use glass bonded or PDMS
microchannels as SU-8 is required for other part of the device.

Regards,
Shib

On Wed, Jan 4, 2012 at 3:28 PM, Kevin Nichols
wrote:

> Unless you've got a really good reason to want an SU-8 channel, just
> give up on the approach. Both glass-bonded microchannels and PDMS
> microchannels are standardized protocols and are widely available in
> the literature, to the point where you can order them both from
> foundries. Go that route if you can.
>
> - Kevin
reply
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