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MEMSnet Home: MEMS-Talk: SU-8 process development
SU-8 process development
2012-01-10
Yingtao Tian
2012-01-10
Gary Hillman
2012-01-11
Shay
2012-01-11
Kevin Nichols
2012-01-12
Yingtao Tian
2012-01-11
Yingtao Tian
2012-01-11
Gareth Jenkins
2012-01-12
Yingtao Tian
2012-01-11
Andrew Sarangan
2012-01-12
Yingtao Tian
2012-01-16
Andrew Sarangan
SU-8 process development
Shay
2012-01-11
The gold coating increases the actual exposure and is many times dispersed.
You might want to try AR coating beneath the SU*

Shay

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Gary
Hillman
Sent: Tuesday, January 10, 2012 10:35 PM
To: 'General MEMS discussion'
Subject: Re: [mems-talk] SU-8 process development

Sounds like you did not expose the material properly. Gary

reply
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