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News	MEMSnet Home: MEMS-Talk: SU-8 process development SU-8 process development 2012-01-10 Yingtao Tian 2012-01-10 Gary Hillman 2012-01-11 Shay 2012-01-11 Kevin Nichols 2012-01-12 Yingtao Tian 2012-01-11 Yingtao Tian 2012-01-11 Gareth Jenkins 2012-01-12 Yingtao Tian 2012-01-11 Andrew Sarangan 2012-01-12 Yingtao Tian 2012-01-16 Andrew Sarangan SU-8 process development Yingtao Tian 2012-01-12 Hi Kevin, Very good point, thanks a lot for the link. I should try to reduce the exposure dose. Yingtao ________________________________________ From: [email protected] [mems-talk- [email protected]] On Behalf Of Kevin Nichols [[email protected]] Sent: 11 January 2012 13:53 To: General MEMS discussion Subject: Re: [mems-talk] SU-8 process development Shay's right. If an AR coating won't work though, the data sheets for SU-8 address this under the "relative dose" tables. In the datasheet for SU-8 3000, for example, this is given in Table 4: http://www.microchem.com/pdf/SU-8%203000%20Data%20Sheet.pdf Table 4: RELATIVE DOSE Silicon 1X Glass 1.5X Pyrex 1.5X Indium Tin Oxide 1.5X Silicon Nitride 1.5 - 2X Gold 1.5 - 2X Aluminum 1.5 - 2X Nickel Iron 1.5 - 2X Copper 1.5 - 2X Nickel 1.5 - 2X Titanium 1.5 - 2 - Kevin reply
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