Hi Gareth,

I could see the structures were not fully developed and the SU-8 layer remained
on the wafer. I did not get a good structure. I will try to reduce the dose as
suggested by Shay and Kevin.

Thanks,
Yingtao

________________________________________
From: [email protected] [mems-talk-
[email protected]] On Behalf Of Gareth Jenkins
[[email protected]]
Sent: 11 January 2012 15:17
To: General MEMS discussion
Subject: Re: [mems-talk] SU-8 process development

Hi

Do you get any structures left on the wafer? If they are falling off during
development, the exposure dose may be too low (as I believe Gary is saying)..
Or do you get some structure on the wafer but with poor resolution? (In
which case Shay's idea may work).

The data sheet exposure dose values should just be a starting point. Many
things may alter results depending on your exact set-up.