Hello,
Can anybody suggest a method to etch SiO2 without etching a buffer layer of
Al2O3?
Thank you.
Best Regards.
--
Domenico Tulli
Nano Photonics-Optoelectronics Group
ICFO-The Institute of Photonic Sciences
Mediterranean Technology Park
Av. Carl Friedrich Gauss, num. 3
08860 Castelldefels (Barcelona), Spain
Tel: +34 93 553 4128
Fax: +34 93 553 4000
E-mail: [email protected]
WEB: www.icfo.es
