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MEMSnet Home: MEMS-Talk: Au-Au thermo-compression wafer bonding
Au-Au thermo-compression wafer bonding
2012-01-16
Ankita Verma
2012-01-17
John Caulfield
2012-01-17
[email protected]
2012-01-17
Roger Shile
2012-01-18
dtulli
2012-01-18
Ankita Verma
2012-01-18
Andrew Sarangan
2012-01-18
Ankita Verma
2012-01-19
Felix Lu
2012-01-25
Michael Martin
Au-Au thermo-compression wafer bonding
Roger Shile
2012-01-17
Domenico,

Please explain how thiol is used in wafer bonding (references?).

Roger Shile

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of
[email protected]
Sent: Monday, January 16, 2012 3:20 PM
To: General MEMS discussion
Subject: Re: [mems-talk] Au-Au thermo-compression wafer bonding

Why don't you try a thiol? It should work at low temperature without
using  much weight.

Regards.
reply
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