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MEMSnet Home: MEMS-Talk: Au-Au thermo-compression wafer bonding
Au-Au thermo-compression wafer bonding
2012-01-16
Ankita Verma
2012-01-17
John Caulfield
2012-01-17
[email protected]
2012-01-17
Roger Shile
2012-01-18
dtulli
2012-01-18
Ankita Verma
2012-01-18
Andrew Sarangan
2012-01-18
Ankita Verma
2012-01-19
Felix Lu
2012-01-25
Michael Martin
Au-Au thermo-compression wafer bonding
dtulli
2012-01-18
During my work, I've been using a thiol (dodecanthiol, hexanthiol...) to
bond two films (around 100nm) of Au deposited on glass. After forming a
SAM (self assembled monolayer), I put a weight on top of my samples and
left them in a oven for several hours at a temperature around 200ÂșC.
I tested the strength of the bonding by lapping and dicing the samples
and it worked.

Hope this help.
Best.

Domenico.

On 17/01/2012 22:15, Roger Shile wrote:
> Domenico,
>
> Please explain how thiol is used in wafer bonding (references?).
>
> Roger Shile

--
Domenico Tulli
Nano Photonics-Optoelectronics Group

ICFO-The Institute of Photonic Sciences
Mediterranean Technology Park
Av. Carl Friedrich Gauss, num. 3
08860 Castelldefels (Barcelona), Spain

Tel: +34 93 553 4128
Fax: +34 93 553 4000
E-mail: [email protected]
WEB: www.icfo.es


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