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MEMSnet Home: MEMS-Talk: Au-Au thermo-compression wafer bonding
Au-Au thermo-compression wafer bonding
2012-01-16
Ankita Verma
2012-01-17
John Caulfield
2012-01-17
[email protected]
2012-01-17
Roger Shile
2012-01-18
dtulli
2012-01-18
Ankita Verma
2012-01-18
Andrew Sarangan
2012-01-18
Ankita Verma
2012-01-19
Felix Lu
2012-01-25
Michael Martin
Au-Au thermo-compression wafer bonding
Ankita Verma
2012-01-18
Can you please provide me some information regarding this tool that you use
for bonding? Like, what is the name of the tool, etc?

Thank You very much for your help!

On Tue, Jan 17, 2012 at 4:39 PM, Andrew Sarangan wrote:

> What you need is a wafer bonding tool, which can easily produce these
> range of forces and temperatures. Also, bonding in vacuum may be
> necessary to eliminate trapped air at the interface. I have one of
> these in my lab if you need further information.
>


--
Best Regards
Ankita Verma
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