A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Au-Au thermo-compression wafer bonding
Au-Au thermo-compression wafer bonding
2012-01-16
Ankita Verma
2012-01-17
John Caulfield
2012-01-17
domenico.tulli@icfo.es
2012-01-17
Roger Shile
2012-01-18
dtulli
2012-01-18
Ankita Verma
2012-01-18
Andrew Sarangan
2012-01-18
Ankita Verma
2012-01-19
Felix Lu
2012-01-25
Michael Martin
Au-Au thermo-compression wafer bonding
Felix Lu
2012-01-19
Hi Ankita,

     Electronic Visions and Suss and probably a few other companies make
bonders. You might also consider looking for a hot isostatic press. These are
usually found in mechanical engineering depts ( and online) - but you have to be
careful  in your interaction with them -- their standards of "clean" (more or
less spit on it and shine  the sample on their shirt...) are very different from
those needed for wafer bonding!

Good luck!

Felix

Applied Quantum Technologies
Durham, NC

On Jan 18, 2012, at 1:03 PM, Ankita Verma wrote:

> Can you please provide me some information regarding this tool that you use
> for bonding? Like, what is the name of the tool, etc?
>
> Thank You very much for your help!
>
> On Tue, Jan 17, 2012 at 4:39 PM, Andrew Sarangan wrote:
>
>> What you need is a wafer bonding tool, which can easily produce these
>> range of forces and temperatures. Also, bonding in vacuum may be
>> necessary to eliminate trapped air at the interface. I have one of
>> these in my lab if you need further information.

----------------------------
Felix Lu
felix_lu@yahoo.com




reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Nano-Master, Inc.
The Branford Group
MEMStaff Inc.
Mentor Graphics Corporation