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MEMSnet Home: MEMS-Talk: Au-Au thermo-compression wafer bonding
Au-Au thermo-compression wafer bonding
2012-01-16
Ankita Verma
2012-01-17
John Caulfield
2012-01-17
domenico.tulli@icfo.es
2012-01-17
Roger Shile
2012-01-18
dtulli
2012-01-18
Ankita Verma
2012-01-18
Andrew Sarangan
2012-01-18
Ankita Verma
2012-01-19
Felix Lu
2012-01-25
Michael Martin
Au-Au thermo-compression wafer bonding
Michael Martin
2012-01-25
Hi,

  What sort of electrical resistance between wafers can be achieved with
thiol bonding?



On Thu, Jan 19, 2012 at 6:51 AM, Felix Lu  wrote:

> Hi Ankita,
>
>     Electronic Visions and Suss and probably a few other companies make
> bonders. You might also consider looking for a hot isostatic press. These
> are usually found in mechanical engineering depts ( and online) - but you
> have to be careful  in your interaction with them -- their standards of
> "clean" (more or less spit on it and shine  the sample on their shirt...)
> are very different from those needed for wafer bonding!
>
> Good luck!
>
> Felix
>
> Applied Quantum Technologies
> Durham, NC
reply
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