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MEMSnet Home: MEMS-Talk: Low temperature Al-Al bonding
Low temperature Al-Al bonding
2012-02-03
Pietro Maoddi
2012-02-06
Matthieu Nannini, Dr.
2012-02-06
Pietro Maoddi
2012-02-07
Pietro Maoddi
2012-02-07
Tony Rogers
Low temperature Al-Al bonding
Tony Rogers
2012-02-07
Hello Pietro,

If I understand your requirement correctly then you should be able to
achieve it using an AML in-situ aligner bonder.

Regards

Tony

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of
Pietro Maoddi
Sent: 07 February 2012 09:45
To: [email protected]
Cc: [email protected]
Subject: Re: [mems-talk] Low temperature Al-Al bonding

Hello,

I considered that option but it seems a little homebrew: the SB6
alignment
jig  is kind of
delicate
and not fit for putting weights on it (the wafers are clamped in the
center
of a ring), so I would have to somehow remove the wafers from the jig
without losing alignment to put them in an oven.

That's why I'm looking for a more "industrial" technique.

Best,
Pietro
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