Hi,

I have a question about 100 silicon wafer KOH anisotropic etch.

I opened a square window on 100 silicon using SiN as protection. Normally the
window should be aligned along 110 direction, so that we can get inverted
pyramid structure, and the plane angle is 55 degree. However, I opened the
window along 100 direction. It seems similar pyramid is obtained. This is weird.
What is the plane direction I got, and what is the side wall angle at this time?

Thanks!

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Best regards,

Xing Sheng

2012-02-29