A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Intermediate layer of tantalum
Intermediate layer of tantalum
2012-03-09
Lina Gonzalez
2012-03-12
Michael Martin
2012-03-23
David Roberts
2012-03-23
Maria Matschuk
2012-03-23
Kevin Nichols
Intermediate layer of tantalum
Michael Martin
2012-03-12
We've used Ta in electrochemical sensors where etching during cyclic
voltametry of the adhesion layer (vs. the top electrode) was a concern.  It
seems to be more rugged than say Cr or Ti

On Fri, Mar 9, 2012 at 10:12 AM, Lina Gonzalez wrote:

> Hi all,
>
> What is the special interaction between sputtered tantalum on glass that
> makes tantalum stick to glass? For example, why would you want a Ta layer
> before depositing NiFe when having a glass substrate?
>
> Thanks,
>
> Lina
>
>
> _______________________________________________
> Hosted by the MEMS and Nanotechnology Exchange, the country's leading
> provider of MEMS and Nanotechnology design and fabrication services.
> Visit us at http://www.mems-exchange.org
>
> Want to advertise to this community?  See http://www.memsnet.org
>
> To unsubscribe:
> http://mail.mems-exchange.org/mailman/listinfo/mems-talk
>
_______________________________________________
Hosted by the MEMS and Nanotechnology Exchange, the country's leading
provider of MEMS and Nanotechnology design and fabrication services.
Visit us at http://www.mems-exchange.org

Want to advertise to this community?  See http://www.memsnet.org

To unsubscribe:
http://mail.mems-exchange.org/mailman/listinfo/mems-talk
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
University Wafer
MEMS Technology Review
Addison Engineering
Mentor Graphics Corporation