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MEMSnet Home: MEMS-Talk: Sapphire waferbonding
Sapphire waferbonding
2012-06-14
Kuijpers, Peter
2012-06-27
Tang Tian
Sapphire waferbonding
Kuijpers, Peter
2012-06-14
Hi all,

I want to perform wafer-bonding on sapphire wafers?
Can someone share some info about this (i.e cleaning method, bond settings)?

Many thanks in advance

Peter Kuijpers
Process Integrator
Philips Innovation Services
MiPlaza/TL group
High Tech Campus 04-p4.20
5656 AE Eindhoven
The Netherlands
Phone: +31 402798904
Mobile:+31 612507027,
Email: [email protected]

www.innovationservices.philips.com


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