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MEMSnet Home: MEMS-Talk: Magic liquid etchant: etches alumina faster than aluminum?
Magic liquid etchant: etches alumina faster than aluminum?
2012-06-20
Ned Flanders
2012-06-20
Kevin Nichols
2012-06-27
Ned Flanders
Magic liquid etchant: etches alumina faster than aluminum?
Kevin Nichols
2012-06-20
35:20 ratio of (85% phosphoric acid):(chromic acid) @ 80C
from J. Electrochem. Soc., Volume 106, Issue 6, pp. 481-485 (1959)

It wasn't a MEMS application, but they used Al foil, and then
anodized, and selectively (and slowly) etched away the oxide they
formed on top of it for TEM analysis of the oxide film.

On Wed, Jun 20, 2012 at 5:44 AM, Ned Flanders  wrote:
> Does it exist?
> If it etches alumina and not aluminum at all, it gets extra magic points.
>
>
> Help?
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