A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Magic liquid etchant: etches alumina faster than aluminum?
Magic liquid etchant: etches alumina faster than aluminum?
2012-06-20
Ned Flanders
2012-06-20
Kevin Nichols
2012-06-27
Ned Flanders
Magic liquid etchant: etches alumina faster than aluminum?
Ned Flanders
2012-06-27
Hey Kevin


since I don't have access to that article (our institution's
subscription goes only as far back as 1990, I think), I'd like just to
make sure I understood correctly: 7:4 ratio? And do they mention the
etch rate of alumina, in their concoction?


Best regards,


m

On Wed, Jun 20, 2012 at 7:40 PM, Kevin Nichols
 wrote:
> 35:20 ratio of (85% phosphoric acid):(chromic acid) @ 80C
> from J. Electrochem. Soc., Volume 106, Issue 6, pp. 481-485 (1959)
>
> It wasn't a MEMS application, but they used Al foil, and then
> anodized, and selectively (and slowly) etched away the oxide they
> formed on top of it for TEM analysis of the oxide film.
>
> On Wed, Jun 20, 2012 at 5:44 AM, Ned Flanders  wrote:
>> Does it exist?
>> If it etches alumina and not aluminum at all, it gets extra magic points.
>>
>>
>> Help?
>> _______________________________________________
>> Hosted by the MEMS and Nanotechnology Exchange, the country's leading
>> provider of MEMS and Nanotechnology design and fabrication services.
>> Visit us at http://www.mems-exchange.org
>>
>> Want to advertise to this community?  See http://www.memsnet.org
>>
>> To unsubscribe:
>> http://mail.mems-exchange.org/mailman/listinfo/mems-talk
> _______________________________________________
> Hosted by the MEMS and Nanotechnology Exchange, the country's leading
> provider of MEMS and Nanotechnology design and fabrication services.
> Visit us at http://www.mems-exchange.org
>
> Want to advertise to this community?  See http://www.memsnet.org
>
> To unsubscribe:
> http://mail.mems-exchange.org/mailman/listinfo/mems-talk
_______________________________________________
Hosted by the MEMS and Nanotechnology Exchange, the country's leading
provider of MEMS and Nanotechnology design and fabrication services.
Visit us at http://www.mems-exchange.org

Want to advertise to this community?  See http://www.memsnet.org

To unsubscribe:
http://mail.mems-exchange.org/mailman/listinfo/mems-talk
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Mentor Graphics Corporation
Tanner EDA by Mentor Graphics
University Wafer
Harrick Plasma, Inc.