Hi Yingtao,

Maybe you can use O2 Plasma, but it is going to damage the thin oxide
film on the top of the chrome.

which is the thickness of the crosslinked SU8?

Best regards,

Karim

On Tue, Jul 17, 2012 at 11:16 AM, Yingtao Tian  wrote:
> Hi All,
>
> I have a chrome/glass mask seriously contaminated by crosslinked SU8, anyone
has an idea how to rescue the mask?
>
> Thanks,
> Yingtao
>
>
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