O2 ashing is standard, possibly a UV/ozone stripper.  Since SU8 is typically
pretty thick, long ash times may be required; keep an eye on temperature and let
things cool down every so often if necessary.  O2 RIE will also work faster than
barrel ashing but you may also see some sputtering of the Cr.  Piranha will
work, but it will slowly attack the Cr (>16 nm/min according to K Williams et
al), so if you have a lot of SU8 you may want to watch out for pattern erosion.
(Also, standard warning to be careful with piranha and read up on its safe use
before setting out!)  Various sources report that specialized strippers
(particulary NMP-based systems) can sometimes help remove SU8 especially if
warmed to about 70 C, but they do it by cracking/crazing/liftoff rather than
direct dissolution of the crosslinked polymer, so they may be best used as a
first step before moving to plasma or piranha.

http://mnm.physics.mcgill.ca/system/files/SU8-Removal.pdf
http://www.ncbi.nlm.nih.gov/pmc/articles/PMC3059272/

On Jul 17, 2012, at 10:16, Yingtao Tian wrote:

> Hi All,
>
> I have a chrome/glass mask seriously contaminated by crosslinked SU8, anyone
has an idea how to rescue the mask?
>
> Thanks,
> Yingtao

_______________________________________________
Hosted by the MEMS and Nanotechnology Exchange, the country's leading
provider of MEMS and Nanotechnology design and fabrication services.
Visit us at http://www.mems-exchange.org

Want to advertise to this community?  See http://www.memsnet.org

To unsubscribe:
http://mail.mems-exchange.org/mailman/listinfo/mems-talk