Yingtao,

Piranha clean,  H2SO4 + H2O2 will remove.

John

-----Original Message-----
From: [email protected] [mailto:mems-talk-
[email protected]] On Behalf Of Yingtao Tian
Sent: Tuesday, July 17, 2012 8:17 AM
To: General MEMS discussion
Subject: [mems-talk] Removal of crosslinked SU8

Hi All,

I have a chrome/glass mask seriously contaminated by crosslinked SU8, anyone has
an idea how to rescue the mask?

Thanks,
Yingtao


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