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MEMSnet Home: MEMS-Talk: Removal of crosslinked SU8
Removal of crosslinked SU8
2012-07-17
Yingtao Tian
2012-07-17
Karim Ogando
2012-07-17
Yingtao Tian
2012-07-17
Mike Whitson
2012-07-17
Shay
2012-07-17
Ad Hall
2012-07-17
Lukasz Urbanski
2012-07-20
Matthieu Nannini, Dr.
Removal of crosslinked SU8
Lukasz Urbanski
2012-07-17
check this paper out - plenty of methods

http://mnm.physics.mcgill.ca/system/files/SU8-Removal.pdf;

citation:

Removal of SU-8 photoresist for thick film applications, Paul M.
Dentinger*, W. Miles Clift, Steven H. Goods,
Microelectronic Engineering 61–62 (2002) 993–1000

2012/7/17 Yingtao Tian :
> Hi All,
>
> I have a chrome/glass mask seriously contaminated by crosslinked SU8, anyone
has an idea how to rescue the mask?
>
> Thanks,
> Yingtao
>
>
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