Hello,

We are working on a MEMS project with Auburn University and we use 4 inch
1:1 contact masks.  Harris Corp. makes the masks for $500 each, which is a
good price for 4 inch masks.  They might make 5 inch masks also.  Charles
Ellis at Auburn University can give you the contact information for Harris
Corp.  His phone nummber is: (334) 844-1883.

Sincerely,

Robert Dean

RF CMOS Designer / Project Manager

MEMS Optical, Inc.
205 Import Circle
Huntsville, AL 35806

(256) 859-1886     Voice
(256) 859-5890     Fax