Try a combination of underetching and sub-micron continous C4F8 and SF6 etching
Run one for a few seconds then run the other
Repeat to achieve required depth
Change relative duration of each to achieve required angle

-----Original Message-----
From: [email protected] [mailto:mems-
[email protected]] On Behalf Of alaa melhem
Sent: Wednesday, 18 July 2012 5:03 AM
To: [email protected]
Subject: [mems-talk] Slope feature!!

Hi There,

Is it possible to apply gray scale lithography on metal material like copper? I
would appreciate if anyone tried that and would I get a thickness slope ending
with some nanometers?

Looking forward to get feedback.

Thank you,
Alaeddin
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