Yes, sol gel resist can be used for nano imprinting technology for fine
structures done to 50 nm, even smaller.

-----邮件原件-----
发件人: [email protected]
[mailto:[email protected]] 代表 sudharshan v
发送时间: 2012年9月5日 23:52
收件人: General MEMS discussion
主题: [mems-talk] Sol gel spin-coating of manganites oxide thin film on
Si(100)-substrate

Hi all,

We've been struggling sol-gel oxides thin film on Si(100) substrate by spin
coating.
Is this sol-gel spin coating technique suitable for microelectronics?
Any tips or suggestions would be greatly appreciated.

Thank you
Sudharshan
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